Dossier
deep ultraviolet (DUV) lithography
Coverage of deep ultraviolet (DUV) lithography in the Nexus archive.
- China’s DUV lithography still lags ASML by four generations
China's deep ultraviolet (DUV) lithography machines remain four generations behind ASML's capabilities, despite media reports suggesting China plans to produce its own immersion DUV lithography equipment. These reports triggered a sell-off in European chip equipment stocks, but Chinese analysts emphasize that China's current DUV technology cannot yet rival ASML's.