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single-crystalline silicon nanomembranes

Coverage of single-crystalline silicon nanomembranes in the Nexus archive.

Earliest in view: May 27 · 00:00 UTCMost recent: May 27 · 00:00 UTC
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Natureorganization1roll-transfer-printingtopic1monolithic three-dimensional integrated circuitstopic1wafer scaletopic1
Recent coverage
  • TECHNOLOGYMay 27 · 00:00 UTCNATURE NEWS
    Monolithic three-dimensional integration of silicon transistors

    Researchers developed a low-temperature roll-transfer-printing process to vertically stack uniformly doped, ultrathin single-crystalline silicon nanomembranes. This scalable method, tolerant to substrate topology and surface roughness, enables high-performance monolithic three-dimensional integrated circuits.